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NeuroNexus silicon neural probes — precision-manufactured electrode arrays

Silicon Neural Probes

Silicon probes for recording and stimulation: 210+ catalog designs, 4 to 1,024 sites, fabricated and tested in-house.

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Silicon probes record and stimulate through sites patterned on a thin silicon shank by integrated-circuit methods, so one insertion samples many known depths at once. NeuroNexus neural probes are the Michigan probe line: 210+ catalog designs, made and tested in our own facility since 2004.

Silicon probes by family

Eleven families. Each card states the trade its layout makes; the glossary term explains it, the webstore lists the designs.

Vector Array probes

Vector Array

Short silicon array on a rigid support body — deep targets in large animals

GlossaryVector Array page
Fusion double-sided silicon probe

Fusion

Electrode sites on both faces of the shank — the site count doubles in the same cross-section

Matrix Array 3D probes

Matrix Array Series

Silicon 3D probe platform — several 32-site 2D arrays, 64 to 256 channels, recording and stimulating

A1x32 linear silicon probe

A-Series

Sites spread along the shank — linear and edge layouts for depth profiling

Buzsaki256 silicon probe

A-Series (Buzsaki)

Staggered sites concentrated at the tip — many units resolved from one penetration

Isomura four-shank silicon probe

A-Series (Isomura)

Parallel shanks at a pitch fixed in fabrication — the same layer across several columns

A4x2 tetrode silicon probe

A-Series (Polytrode & Tetrode)

Sites clustered rather than spread — polytrode and tetrode groups a sorter can separate

Q-Trode single-shank tetrode probe

Q-Trode Series

Four sites clustered at one depth — isolation by amplitude ratio, not a depth profile

rDBSA research deep brain stimulation array

DBS Series

Clinical lead geometry with more and smaller contacts — 32 addressable along one shaft

Drug Delivery probe with fluidic channel

Drug-Delivery Series

Stainless-steel fluidic channel beside the array — infuse and record at one site

SiNAPS active-pixel probe

HD Series (SiNAPS)

Active pixel under every electrode — digitized on the shank, 256 to 1,024 sites

Vector Arrays

Hybrid silicon and stainless steel microelectrodes for large-scale neural recording in primates and deep brain structures. Up to 128 channels with electrode access depths exceeding 100 mm — reaching targets that conventional silicon probes cannot.Vector Arrays combine the site density and spatial precision of silicon probes with the mechanical robustness required for chronic large-animal implantation.

Up to 128 Channels

High-density laminar recording across cortical layers and deep nuclei.

110+ mm Depth Access

Reach deep brain targets in primates and large animals.

Chronic Implantable

Designed for long-term recording in freely moving animals.

NeuroNexus Vector Array — high-density laminar probe

Fusion Probes

Double-sided silicon probes with 360° electrode coverage and integrated optical waveguides for simultaneous optogenetic stimulation and electrical recording. Available in 32, 64, and 128 channel configurations.Fusion probes eliminate the need for separate optical fibers and recording electrodes — reducing surgical complexity and improving spatial co-registration between stimulation and recording sites.

360° Electrode Coverage

Double-sided site placement captures activity from all directions around the shank.

Integrated Optogenetics

Built-in optical waveguides for precise light delivery at recording sites.

Acute & Chronic

Available in both acute reusable and chronic implantable form factors.

NeuroNexus Fusion probe — dual-sided optoelectrode

Finding the right silicon probe

With 210+ designs, the portfolio is navigated by application, by geometry, or with our help.

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Filter by site count, shank configuration, site spacing, application, and form factor.

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Silicon probe, defined

The glossary entry: what a silicon probe is, its catalog facts, and the papers that established it.

Read the definition
Probe technology: questions and answers

Site materials, impedance, reuse, chronic stability, and what the layout changes.

Read the answers
Talk to a Scientist

Our application scientists can help you select or design the optimal configuration for your experiment.

Request Consultation
Every NeuroNexus probe is fabricated, assembled, and electrically characterized in our own facility — the same facility where the Michigan probe was first manufactured. No third-party fabrication. Full traceability from wafer to packaged device. Acute probes are validated for 50+ reuses.

Your probe determines which headstage and DAQ you need. Every NeuroNexus probe includes a headstage compatibility specification — connector type, channel count, and impedance range are matched at the design stage. Need help building the recording chain? Start with your probe and we'll recommend the rest.

Better Data Starts at the Electrode

Radiens knows your probe — its geometry, channel map, and expected electrical characteristics. When you record with a NeuroNexus probe through Radiens, you get real-time signal quality assessment tuned to the specific device in your experiment.That's the advantage of vertical integration: the company that fabricated the electrode also wrote the software that evaluates its performance.

Radiens Allego — real-time signal quality assessment with probe-specific intelligence

Proven in the Field

5,000+ Papers

Peer-reviewed publications using NeuroNexus probes

1,000+ Labs

Research institutions across six continents

210+ Designs

Validated probe configurations in the current catalog

22 Years

Continuous production from the team that built the Michigan probe

Cited in published research

Published work with silicon neural probes

More than 5,100 peer-reviewed papers cite NeuroNexus electrodes. Representative examples include:

Kyriazi, Headley & Paré (2018) · Neuron

Multi-dimensional coding by basolateral amygdala neurons

DOI

Headley, Kyriazi, Feng, Nair & Paré (2021) · The Journal of Neuroscience

Gamma oscillations in the basolateral amygdala: localization, microcircuitry, and behavioral correlates

DOI

Angotzi et al. (2019) · Biosensors and Bioelectronics

SiNAPS: an implantable active pixel sensor CMOS-probe for simultaneous large-scale neural recordings

DOI

Vetter et al. (2004) · IEEE Transactions on Biomedical Engineering

Chronic neural recording using silicon-substrate microelectrode arrays implanted in cerebral cortex

DOI

Kipke, Vetter, Williams & Hetke (2003) · IEEE Transactions on Neural Systems and Rehabilitation Engineering

Silicon-substrate intracortical microelectrode arrays for long-term recording of neuronal spike activity in cerebral cortex

DOI

Drake et al. (1988) · IEEE Transactions on Biomedical Engineering

Performance of planar multisite microprobes in recording extracellular single-unit intracortical activity

DOI

Wise, Angell & Starr (1970) · IEEE Transactions on Biomedical Engineering

An integrated-circuit approach to extracellular microelectrodes

DOI

Care, use and handling

Setup, handling, cleaning and storage for silicon probes are documented once, in the resource library.

Silicon Probes: Setup, Handling, Cleaning and Care

Inspect, measure impedance, mount, connect, verify, clean in order, store. Never ultrasonic, never autoclave.

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Care, use and handling hub

The set by electrode class: silicon probes and thin-film grids, with the surgical guides each links to.

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Silicon probes — FAQ

By design family — geometry, channel count, shank configuration, and application — across 210+ validated silicon designs. Filter by any of these in the webstore.

Probe designs span 4 to 1,024+ channels, from single-shank linear arrays to high-density and 3-D multi-shank configurations.

Yes — custom geometry, materials, and packaging are designed and fabricated in-house; talk to an application scientist to scope one.

The material is silicon, the semiconductor the shank and its electrode sites are fabricated on; "silicone", the polymer, is a common misspelling. A NeuroNexus silicon probe is a microelectrode array for recording or microstimulation.

Open the webstore filtered to probes and compare channel count, site geometry, and configuration.

Find the right probe for your experiment

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NeuroNexus

Neural probes, data acquisition systems, and analytics software for neuroscience research. Designed and manufactured in Ann Arbor, Michigan.

sales@neuronexus.com
+1 734 913 8858

640 Avis Drive, Suite 200, Ann Arbor, MI 48108

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